JPS6360321B2 - - Google Patents

Info

Publication number
JPS6360321B2
JPS6360321B2 JP19850882A JP19850882A JPS6360321B2 JP S6360321 B2 JPS6360321 B2 JP S6360321B2 JP 19850882 A JP19850882 A JP 19850882A JP 19850882 A JP19850882 A JP 19850882A JP S6360321 B2 JPS6360321 B2 JP S6360321B2
Authority
JP
Japan
Prior art keywords
light beam
scanning light
rotating
optical axis
collimator lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19850882A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5988607A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19850882A priority Critical patent/JPS5988607A/ja
Priority to US06/550,292 priority patent/US4639141A/en
Publication of JPS5988607A publication Critical patent/JPS5988607A/ja
Publication of JPS6360321B2 publication Critical patent/JPS6360321B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP19850882A 1982-11-12 1982-11-12 光学式測定装置 Granted JPS5988607A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP19850882A JPS5988607A (ja) 1982-11-12 1982-11-12 光学式測定装置
US06/550,292 US4639141A (en) 1982-11-12 1983-11-09 Scanning ray beam generator for optical measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19850882A JPS5988607A (ja) 1982-11-12 1982-11-12 光学式測定装置

Publications (2)

Publication Number Publication Date
JPS5988607A JPS5988607A (ja) 1984-05-22
JPS6360321B2 true JPS6360321B2 (en]) 1988-11-24

Family

ID=16392297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19850882A Granted JPS5988607A (ja) 1982-11-12 1982-11-12 光学式測定装置

Country Status (1)

Country Link
JP (1) JPS5988607A (en])

Also Published As

Publication number Publication date
JPS5988607A (ja) 1984-05-22

Similar Documents

Publication Publication Date Title
US5175595A (en) Non-contact measuring device
EP3772633B1 (en) Surveying instrument
EP0110937B1 (en) Apparatus for measuring the dimensions of cylindrical objects by means of a scanning laser beam
US4043673A (en) Reticle calibrated diameter gauge
US4521113A (en) Optical measuring device
JPS6341484B2 (en])
US4639141A (en) Scanning ray beam generator for optical measuring device
JPS6360321B2 (en])
US4692629A (en) Optical type measuring scanner
JP2865337B2 (ja) 光学測定装置
JPH0371044B2 (en])
JPS59231403A (ja) 非接触型３次元測定器
EP0310231B1 (en) Optical measuring apparatus
JP3912644B2 (ja) ガラス管の測定方法
JPS61234306A (ja) 光学式測定装置
JP2524794Y2 (ja) 光学式走査型測定装置
JPS6365885B2 (en])
JPH0552523A (ja) 光学式寸法測定器
JP2674129B2 (ja) 距離測定装置
JPH02155024A (ja) 三次元座標入力装置及びその位置指示器
JPH0380242B2 (en])
JPS6138407A (ja) 傾き測定装置
JPS61234307A (ja) 光学式測定装置
JPS63191909A (ja) 光学式走査型測定装置
RU2047091C1 (ru) Устройство для измерения поперечного размера детали